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HORIBA Scientific’s UVISEL Plus, a modular ellipsometer, includes FastAcq, a new acquisition technology designed to measure thin film samples faster and more accurately. FastAcq is based on double modulation, designed for real-world thin film characterization. Based on a new electronic data processing and high-speed monochromator, FastAcq technology enables a sample measurement from 190 to 2100 nm to be completed within 3 minutes. The possibility to continuously adjust the spectral resolution along the measurement range allows smarter and faster scanning. Designed for enhanced flexibility, the UVISEL Plus offers microspots for patterned samples down to 50 µm, variable angle from 40 to 90°, an automatic horizontal mapping stage and a variety of accessories. Driven by the advanced DeltaPsi2 software platform, as well as the Auto-Soft interface featuring an intuitive workflow to speed up data collection and analysis, the spectroscopic ellipsometer allows users from novice to expert to perform thin film measurements with high accuracy and sensitivity.
HORIBA Scientific
www.horiba.com, 949-250-4811

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