97% Reflectance at 193 nm
ExciLife-193 is a highly durable 193-nm optical coating for OEM applications where high durability and long-term resistance to laser damage are important. Applications include use for LASIK systems, immersion lithography, material processing, industrial marking and wafer exposure systems. At a 45° incidence angle, the coatings provide >97% reflectance at 193 nm and are certified in the proprietary in-house metrology laboratory. They also pass MIL-SPEC adhesion, abrasion and humidity. In lifetime testing, the MaxR@45° design was tested at 300 mj/cm2, 100 and 200 Hz for 2 million laser pulses without damage or change in reflectivity. For immersion lithography applications, the coating was placed in DI-water for 1 week and then laser tested at >500 mj/cm2, 100 Hz, 100,000 pulses without damage. Available in OEM volumes, the coatings can also be optimized for use at incidence angles from 0° to 45°.
