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3-D Laser Confocal Microscopy-based Metrology System
The LEXT OLS3100, a three-dimensional laser confocal microscopy-based metrology system, minimizes the need for manual operation and improves ease of use for all functions. The operation navigator provides animations to guide users through each step of microscopic observation, enabling the completion of a series of steps by simply using the mouse in the same way as shown in the animations. 3-D image capturing can be performed with just one click of the “3-D capture button”. Time consuming tasks, such as setting the upper and lower focal limits, are completed automatically. The system offers a full range of measurement and analysis functions to meet any requirement. The 3-D handling technology enables step height, line width and the distance between two points to be measured in a 3-D image. The LEXT integrates an apochromatic objective lens specially developed for confocal laser scanning microscope (cLSM) with a near-UV (408-nm) laser light.
Olympus Life and Material Science Europa GMBH
Microscopy
Wendenstr. 14-18
20097 Hamburg
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