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FT-IR Metrology Tool Employs EFEM

The ECO 3500 FT-IR metrology system meets industry standards of cleanliness in microenvironments. Featuring a proven spectrometer and enhanced analytical software, the tool is suited for seamless integration into automated wafer handling facilities. An enhanced software interface provides full SEMI E95-compliant access for process engineering, research and production monitoring applications. Improved wafer handling capabilities include two in-line load ports and a high precision edge grip stage. The FT-IR metrology tool utilizes Asyst Technologies’ Spartan EFEM (equipment front-end module), rated ISO Class 1 for particle contamination, high operational speed and simplified mechanical design. The dual end-effector configuration with two 300-mm in-line load ports speeds up the wafer transfer process between the FOUP (front opening unified pod) and the wafer stage and optimizes sample throughput.
Thermo Scientific
450 Fortune Blvd.
Milford, MA, 01757