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Batch Furnace Systems Fully Warranted and Serviced

Small batch furnace systems contain six or eight furnace tubes and gas systems contained in a single frame assembly. They include diffusion, oxidation, and LPCVD processing for wafers up to 6" in diameter. Applications include pilot line, R&D, and educational uses. Windows-based control, manual, or cantilever loading and flow meter or MFC gas systems provide versatile configurations with budget flexibility. These systems are fully warranted and serviced, and are offered with guaranteed process performance.
Steed Technology Inc.
56 Old El Pueblo Rd.
Scotts Valley, CA, 95066