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Residual Gas Analyzers
for pressures as low as 5 × 10-14 mbar
The residual gas analysers (RGA's) cover mass ranges 1-100, 1-200, or 1-300, and are capable of detecting partial pressures as low as 5 × 10-14 mbar (3.75 × 10-14 Torr), clearly defining the residual gas spectrum. They feature GasWorks software, a graphic user interface with features for either novice process technicians or experienced analytical scientists. The software allows for click-and-go measurement, or access to advanced features including derived values, scheduled scans, data logging, alarms, background filtering, or comparing spectra to a stored data library. For sensitivity above 50 amu and enhanced peak separation, SMART IQ+ models come with a triple filter.
Thermo Vacuum Generators 355 River Oaks Parkway San Jose, CA, 95134
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