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XRD Software Offers Five Different Algorithms
X’Pert Epitaxy and Smoothfit software version 4.2 allows the detailed analysis of semiconductor epitaxial layers using the company’s X’Pert PRO MRD, as well as earlier high-resolution X-ray diffractometers. The package is part of the proprietary X’Pert software range that uses XRDML formatting. When analyzing semiconductor epitaxial layers, obtaining a good fit of simulation to data can be a challenge. Version 4.2 automatically fits simulated rocking curves to measurement data. It offers five different algorithms and can be tailored for unique fitting requirements. Default fitting parameters for all algorithms allow ‘quick start’ software use and as experience builds, algorithms can be selected as required.
PANalytical
117 Flanders Road
Westborough, MA, 01581
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