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Miniature Regulator for High-Purity Gases
The miniature, point-of-use MiniQR pressure regulator reduces semiconductor tool real estate and costs. Featuring the same dimensions as the proprietary Quantum valves and SQMicro regulators, it allows semiconductor tool OEMs to mount gas stick components more closely to reduce system footprints. Suited for pressure control of high purity gases, the device is threadless, non-tied and features a double diaphragm. Despite the compact footprint of 1.25 in-sq, the device offers high performance including a Cv of 0.1 and can accommodate inlet pressures to 500 psig. Outlet pressure ranges include 1-30, 1-60, 2-100 or 3-250 psig. The relatively high Cv and operating range enable the device to be purged rapidly. The regulator may be used also in a variety of applications, allowing tool OEMs to standardize with one component across a range of systems. It is fabricated from 316L stainless steel with Hastelloy C-22 diaphragms and an Inconel poppet.
Parker Hannifin Corp.
Instrumentation Valve Div.
2651 Alabama Highway 21 North
Jacksonville, AL, 36265-9681
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