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Trace Gas Analyzers
provide real-time analysis
Booth 3300. The fully automated Purity gas analyzer provides continuous trace impurity detection in high purity bulk process gases, such as ammonia, nitrogen trifluoride, hydrogen and nitrous oxide. For bulk gas suppliers, the analyzer offers the ability to certify bulk gases to higher grades. The MultiGas 2030 analyzer is used for direct monitoring of fab emissions stack monitoring to ensure compliance with PFC abatement requirements and catalytic by-product emissions. Capable of 1 ppb sensitivity for multiple gas species present in effluent streams that contain up to 30% water absolute, the system detects losses in abatement efficiency in real-time. It measures NOx, NH3, SOx and hydrocarbons, as well as other combustion and catalytic by-products, directly and accurately with a single analyzer.
MKS Instruments, HPSProducts
5330 Sterling Drive
Boulder, CO, 80301
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