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Dry Vacuum Pump Delivers Low Particulate Generation
The positive displacement, dry pump technology XtraDry features a simple piston style design that does not expose the bearings to high vacuum conditions. It provides a hydrocarbon-free vacuum and does not generate particulates that can contaminate vacuum processes. Operating characteristics make the pump suited for use in semiconductor applications, such as load locks and differential seals, as well as a backing pump for turbo pumps in high vacuum systems. A flexible and simple, low vibration design permits multiple pump configurations while having few moving parts. Pumping speed is independent of gas species with a two-stage version providing a pumping speed of 7 m3/hr and a base pressure of 0.05 mbar. A single-stage model supplies a pumping speed of 14 m3/hr and a base pressure of 3 mbar. The pump features a quiet single-phase motor for ease of use and an integrated gas-ballast valve for improved vapor-handling capability. Application uses include those that experience particulate contamination generated by scroll pumps.
Pfeiffer Vacuum
24 Trafalgar Sq.
Nashua, NH, 03063-1988
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