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DualBeam SEM/FIB Suited for 3-D Nanoscale Characterization

The Quanta 3D is an analytical SEM/FIB DualBeam suited for 3-D nanoscale characterization, analysis and prototyping. Combining advanced ion and electron optics with the environmental SEM technology of the Quanta family, this new system eliminates the boundaries imposed by traditional high vacuum systems. Users are provided with high levels of versatility and flexibility. The system utilizes a high current ion column for rapid, site-specific cross-sections of samples to reveal sub-surface structures and features while the advanced electron source design delivers improved SEM imaging. Further, the increased electron beam current enables higher throughput spectroscopy.
FEI Company
5350 NE Dawson Creek Dr.
Hillsboro, OR, 97124