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SEM for Ultra-High Resolution Characterization

From the Nova family of SEM and DualBeam systems, the NanoSEM is a low-vacuum, field emission scanning electron microscope (FEG-SEM) for ultra-high resolution characterization of charging and/or contaminating samples, such as organic materials, substrates, porous materials, plastics and polymers. The proprietary Helix detector technology, introduced with the instrument, combines magnetic immersion lens and low-vacuum SEM technologies. The combined effect delivers ultra-high resolution, low-vacuum characterization capabilities in an environment that suppresses charge build-up on non-conductive materials. The incorporated technology also suppresses electron-beam induced contamination resulting from previous sample processing steps. The instrument also features in-lens, as well as low-vacuum secondary and back scatter electron (BSE) imaging modes, and proprietary beam gas chemistries for e-beam writing of nanostructures, making the SEM suited for research and advanced study of nano-structures and nano-materials.
FEI Company
5350 NE Dawson Creek Dr.
Hillsboro, OR, 97124