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Field Emission Electron Probe Microanalyzer

The JXA-8500F advanced electron probe microanalyzer (EPMA) with a thermal field emission electron gun is designed for high-resolution, low-accelerating-voltage microanalysis and ultra-high resolution imaging of solid materials. The fully automated, high-throughput microprobe simultaneously utilizes up to five wavelength dispersive x-ray spectrometers (WDS) and an energy dispersive x-ray spectrometer (EDS) for combined quantitative and qualitative element analysis of submicron sample areas. It is the only EPMA with a Schottky-type field emission gun that produces a pinpoint probe diameter one-half to one-tenth the size of conventional probes, as small as 40nm (10nA and 10kV).
JEOL Inc.
11 Dearborn Rd.
Peabody, MA, 01960